TITLES

James W. Bayne Professor
Director of the Center of Advanced Materials for the Purification of Water with Systems
Micro-Nano-Mechanical Systems Laboratory
Department of Mechanical Science and Engineering (MechSE)
University of Illinois at Urbana-Champaign

EDUCATION   

University of California, Berkeley

Doctor of Philosophy in Mechanical Engineering, December 1993

Master of Science in Mechanical Engineering, May 1991

Bachelor of Science in Mechanical Engineering, May 1989

PROFESSIONAL EXPERIENCE

University of Illinois at Urbana-Champaign

Nov. 2004-present               Director, Center for Advanced Materials for Purification of Water with Systems

Aug. 2004-Nov. 2004       Interim Director, Center for Advanced Materials for Purification of Water with Systems

Aug. 2004-present               Professor of Mechanical Engineering (100%), Electrical & Computer Engineering (0%), BioEngineering (0%)

Aug. 2002-present               Directo,., Micro-Nano-Mechanical Systems Laboratory, Department of Mechanical and Industrial Engineering

Aug. 2000-Aug. 2004        Associate Professor, Department of Mechanical & Industrial Engineering (100%), Department of Electrical & Computer Engineering (0%), BioEngineering (0%)

Jul. 1997-present                   Affiliate, Beckman Institute for Advanced Science & Technology, (0%)

Mar. 1996-Aug. 2000        Assistant Professor, Department of Electrical & Computer Engineering (0%)

Aug. 1994-Aug. 2000        Assistant Professor, Department of Mechanical & Industrial Engineering (100%)

Lawrence Berkeley National Laboratory, Berkeley, CA

Dec. 1993-Aug. 1994 Post-Doctoral Researcher

Aug. 1989-Dec.1993       Graduate Research Assistant, UC-Berkeley and LBNL

HONORS

• James W. Bayne Professor
• Willet Faculty Scholar 2004-2005
• Xerox Award for Faculty Research 2004
• Kritzer Faculty Scholar 2003-2004
• The Multi-Year Faculty Achievement Award, College of Engineering, March 31, 2003
• Accenture Award for Excellence in Advising, UIUC - 2001, 2002, 2003
• National Science Foundation CAREER Award - 1997-2001
• Andersen Consulting Award for Excellence in Advising, Engineering - 1995 & 1998
• International Business Machine Fellowship -1990/1991 & 1991/1992
• James Marshall Wells Scholarship - 1989/1990
• Frank Jarrett Machine Design Award, U.C. Berkeley - May 1989
• Chabot College Outstanding Freshman Chemistry Award - 1986

EDUCATION GOALS

         My view of education, research, and service at the University level is that our efforts should work to advance the state-of-knowledge: of individual students, of our specific fields of interest, and of the public at-large. My personal style is to educate through advising, mentoring, research, and multi-disciplinary education. A major goal of mine is to cross over the traditional borders of mechanical engineering (ME), and provide students with a multi-disciplinary engineering education that will prepare them for a lifetime of learning, whether in industry, research, or education. Technology is rapidly increasing in complexity, and often requires using different approaches to solve problems. Moreover, what once was squarely in one field of study now often bridges two or more fields. Students who can apply the fundamentals of electrical, mechanical, and materials engineering can help to advance the state-of-knowledge and create new technologies. In addition to teaching core courses in ME, one of my goals is to advance multi-disciplinary education for ME and other students from the College by providing opportunities to learn about: (i) laser science, (ii) coupled E&M and continuum mechanics, and (iii) microfabrication. I approach each engineering course from classical physics, incorporating quantum mechanics, chemistry, surface and microscale physics as appropriate. To date I have developed two new courses in laser science and in microfabrication, and one on advanced materials for water treatment. The microfabrication course covers advanced fabrication techniques, including CMOS and post-CMOS techniques.

         As part of my educational contributions, I have made a major effort to teach and recruit a diverse group of students at both the undergraduate and graduate level. As the Human Resource Director of both the STC Water CAMPWS and the NSEC nano-CEMMS, I supervised Diversity Program Coordinators in an effort to increase students from underrepresented groups studying engineering and science. As the Director of CAMPWS, I am intensifying these efforts. Our work starts at the K-12, with an emphasis on middle school and rising high school students, then extends to undergraduate programs for recruitment and retention, and finally to increasing the number of graduate students getting PhD's so that academia may also increase its representation. Increasing representation in science and engineering to me is more important than just satisfying NSF and societal goals. I believe that we need to increase representation of underserved and underrepresented groups because very often these groups are adversely impacted by situations and environments that science and technology can help remediate. Highly educated and trained people with first-hand knowledge of problems affecting a group can be highly effective in finding solutions.

Courses Taught

• Freshman Discovery: Introduction to Mechanical Engineering, ME 199
• Introduction to Thermodynamics, ME 205
• Introduction to Heat Transfer, ME 213
• Introduction to Mechanical Design, ME 270
• Senior Capstone Design, ME 280
• Intermediate Heat Transfer, ME 306
• Theory, Fabrication, and Characterization of Microelectromechanical Systems (MEMS), ME 393 DMS
• Laser Processing of Materials, ME 497 DJM
• Laser-Material Interactions and Processing, ME 497 DMS
• Materials for Water Treatment Systems, CEE 598
• Ranked as excellent for Fall 1998, Spring 2001, Spring 2002, Spring 2004 in the Daily Illini "Incomplete List of Teachers Ranked as Excellent by their Students."

Courses Developed

Undergraduate/Graduate Course Development

         Theory, Fabrication, and Characterization of Microelectromechanical Systems (MEMS) and Devices, ME 494 DMS

         I have developed a new course in advanced microfabrication and design of MEMS with faculty across the College of Engineering for all CoE students at the senior undergraduate and first year of graduate school level. This is a laboratory course on the physical theory, design, analysis, fabrication, and characterization of Microelectromechanical systems (MEMS). The main objective is on the fabrication of important types of microstructures used in MEMS devices. Therefore, the emphasis is on techniques used in the fabrication of MEMS. The course includes bulk and surface micro-machining techniques (anisotropic wet etching, deep reactive ion etching, CMOS-derived processing, LPCVD and PECVD deposition, metalization techniques, dielectric sputtering, polymer processing and micro-fluidic fabrication, aligning and bonding). Methodologies to design, analyze, model, test, and characterize the two MEMS devices fabricated during the semester are also presented. CMOS processing, MEMS applications and their scaling effects are not emphasized, as these are the subject of other courses, such as ECE 344, ECE 384, and ECE 385.

Graduate Course Development

Materials for Water Treatment Systems , CEE 598

                  The objective of Materials for Water Treatment Systems course is to educate students so that they are able to work at the interface of materials and water purification. This course will develop fundamental concepts related to the aqueous interface between materials and water that includes constituents normally found in source waters, such as salts, natural organic materials, pathogens, and industrially-derived contaminates. Fundamental mechanisms of interactions of water and constituents with materials will be presented, including separation theory, absorption/desorption, ion exchange, reversible and irreversible chemical reactions in heterogeneous material systems, and transport phenomena. Property-structure relationships of materials required for differing water treatment modalities will be presented. This course will also review classical materials used in water treatment systems, introduce emerging materials and water purification methods for the removal of priority pollutants and membrane foulants. Applications will include drinking water treatment systems, waste treatment and water reclamation, desalination, and point of use systems.

Laser-Material Interactions and Processing, ME 597 DMS

                  After teaching a graduate class in Laser Processing of Materials, I subsequently revised the course to Laser-Material Interactions and Processing. The revised course draws heavily from the fields of electromagnetism, laser science, radiative heat transfer, plasma interactions, and material science. Since students are primarily drawn from ME, I first introduce laser systems, linear optics, Gaussian beams, and the ABCD law. I then introduce electromagnetic wave propagation in media with Maxwell's equations, and briefly cover linear and non-linear wave propagation, plasma interactions, intensity formulations, and non-linear propagation through laser-induced inhomogeneous media. The core of the course covers laser-material interactions, such as low-power interactions (heating, melting, etc.), high-power interactions (ablation, shock hardening, etc.). Depending on the interests of the students, I cover various laser-material interactions , such as chemical additive and subtractive processes, phase transformations, and novel material fabrication.

Short Courses

• NSF Summer School, May 22, 2002, morning session, "Introduction to MEMS and Fabrication."
  
• Modine Manufacturing, May 1, 2002, "Microelectromechanical Systems (MEMS) and Advanced Microfabrication.

 

PUBLICATIONS

2006

•  Yeom, J., R. S. Jayashree, C. Rastogi, M. A. Shannon, P. J. Kenis, "Passive direct formaic acid microfabricated fuel cells," Journal of Power Sources , 2006.

•  Flachsbart, B.R., K. Wong, J.M. Iannacone, E.N. Abante, R.L. Vlach, P.A. Rauchfuss, P.W. Bohn, J.V. Sweedler, and M.A. Shannon, "Design and fabrication of a multilayered polymer microfluidic chip with nanofluidic interconnects via adhesive contact printing," Lab-On-A-Chip , 6, 667-674, 2006.

•  Timothy M. Long, Shaurya Prakash, Mark A. Shannon, and Jeffrey S. Moore, Water-Vapor Plasma-based Surface Activation for Trichlorosilane Modification of PMMA," Langmuir 22 , 4104-4109, 2006.

•  Yan Wu and Mark A. Shannon, An AC driving amplitude dependent systematic error in Scanning Kelvin Probe Microscope measurements: Detection and correction," Review of Scientific Instruments , 77, 043711, 2006.

•  Chandrasekharan, R., S. Prakash, R.I. Masel, M.A. Shannon, "Change in radiative optical properties of T a 2 O 5 thin-films due to high temperature Heat Treatment," Journal of Heat Transfer, (in press 2006).

•  Kuan-Lun Chu, Mark A. Shannon, Richard I. Masel, "An improved miniature direct formic acid fuel cell based on nanoporous silicon for portable power generation," Journal of The Electrochemical Society , (in press 2006).

2005

•  Prakash, S., Glumac, N.G., Shankar, N., Shannon, M.A. "OH Concentration Profiles over Alumina, Quartz and Platinum Surfaces using Laser-Induced Fluorescence Spectroscopy in Low-Pressure Hydrogen/Oxygen Flames," Combustion Science and Technology , 177: 4, 793-817, 2005.

•  Miesse, C. M., R. J. Masel, M. Short, and M. A. Shannon, "Experimental Observations of Methane-Oxygen Diffusion Flame Structure in a Sub-millimeter Microburner," Combustion Theory and Modeling, Institute of Physics Publishing, Ltd. 9, 77-92, 2005.

•  Jayashree, R. S., J. S. Spendelow, J. Yeom, C. Rastogi, M. A. Shannon, and P. J. A. Kenis, " Characterization and Application of Electrodeposited Pt, Pt/Pd, and Pd Catalyst Structures for Direct Formic Acid Micro Fuel Cells," Electrochimica Acta, 50 (2005) 4674-4682.

•  He, D., M.A. Shannon, and N.R. Miller, "Micromachined Silicon Electrolytic Conductivity Probes with Integrated Temperature Sensor," IEEE Sensors Journal 5, (6), 1185-1196, 2005.

•  Jeong, H. K., R. chandrasekharan, K. L. Chu, M. A. Shannon, and R. I. Masel, "Rapid thermal processing of mesoporous ilica films: a simple method to fabricate films micrometers thick for microelectromechanical systems (MEMS) applications," Ind. Eng. Chem. Res., 44, 8933-8937, 2005.

 •  Chandrasekharan, R., I. Park, R.I. Masel, and M.A. Shannon, "Thermal Oxidation of Tantalum Films at Various Oxidation States from 300 - 700°C," Journal of Applied Physics 98 , 114908, 2005.

•  Gold, S. A., K-L. Chu , C. Lu, M. A. Shannon, and R. I. Masel, "Porous Silicon as a Proton Exchange Membrane for Micro Fuel Cells," Journal of Power Sources, 2005 135(1-2): 198-203.

•  Yeom, J., Y. Wu, J.C. Selby, and M.A. Shannon, "Maximum Achievable Aspect Ratio in Deep Reactive Ion Etching of Silicon due to Aspect Ratio Dependent Transport and the Microloading Effect," The Journal of Vacuum Science and Technology B 23 , 2319-2329, 2005.

•  Yeom, J., G. Z. Mozsgai, B. R. Flachsbart, E. R. Choban, A. Astana, M. A. Shannon, and P. J. A. Kenis, "Microfabrication and Characterization of a Silicon-based Millimeter Scale, PEM Fuel Cell Operating with Hydrogen, Methanol, or Formic Acid," Sensors and Actuators B, 107 (2,) 882-891, 2005.

2004

•  Miesse, C. M., C. J. Jensen, R. I. Masel, M. A. Shannon, and M. Short, "Sub-millimeter Scale Combustion," AIChE Journal, 50: 12 , 3206, 2004.

•  Tulock, J. Jl, M. A. Shannon, P. W. Bohn, J. V. Sweedler, "Microfluidic Separation and Gateable Fraction Collection for Mass-Limited Samples," Analytical Chemistry , 76, 6419-6425, 2004.

•  Kuo, T.-C., H.-K. Kim, D. M. Cannon, Jr., M. A. Shannon, J. V. Sweedler, and P. W. Bohn , " Nanocapillary Arrays Effect Mixing and Reaction in Multilayer Fluidic Structures ," Angewandte Chemie International Edition, 43,1862-1865, 2004.

•  Cannon, Jr., D. M., B. R. Flachsbart, M. A. Shannon, J. V. Sweedler, and P. W. Bohn, "Fabrication of Single Nanofluidic Channels in Polymethylmethacrylate) Films via Focused-ion Beam Milling for Use as Molecular Gates," Applied Physics Letters , 85: 7 , 1241, 2004; and Virtual Journal of Nanoscale Science and Technology , 10: 8 , 2004.

•  Xu, K., J. C. Selby, M. A. Shannon, and J. Economy, "Adhesion Mechanisms in the Solid-State Bonding Technique using Submicrometer Aromatic Thermosetting Copolyester Adhesive," Journal of Applied Polymer Science , 92: 6 , 3843-3856, 2004.

•  Bae, B-H, B. R. Flachsbart, K. Park, and M. A. Shannon, "Design Optimization of a Piezoresistive Pressure Sensor Considering the Output Signal-to-noise Ratio," Journal of Micromechanics and Microengineering, 14, 1597-1607, 2004 .

•  Wu, Y. and M. A. Shannon, "Theoretical Analysis of the Effect of Static Charges in Silicon-Based Dielectric Thin Films on Micro- to Nanoscale Electrostatic Actuation," Journal of Micromechanics and Microengineering 14 , 989-998, 2004.

•  Miesse, C. M., R. I. Masel, M. Short, and M. A. Shannon, "Diffusion Flame Instabilities in a 0.75mm Non-premixed Microburner," Proceedings of the Combustion Institute , 30, 2004.

2003

•  Kuo, T.-C., D. M. Cannon Jr., Y. Chen. J. J. Tulock, M. A. Shannon, J. V. Sweedler, and P. W. Bohn, "Gateable Nanofluidic Interconnects for Multilayered Microfluidic Separational Systems," Analytical Chemistry, 75, 1861-1867, 2003.

•  Pahl, R. J. and M. A. Shannon, "Design of a Cylindrical High-Voltage High-Temperature Vacuum Insulator," IEEE Transactions on Dielectrics and Electrical Insulation , 10, 240-244, April 2003.

•  Hammonds, J. S. and M. A. Shannon, "The Effect of Laser Light Propagation Through a Self-Induced Inhomogeneous Process Gas on Temperature Dependent Laser-Assisted Chemical Etching," International Journal of Heat and Mass Transfer , 46: 3 , 523-534, January 2003.

•  Kuo, T.-C., D. M. Cannon, Jr., M. A. Shannon, P. W. Bohn, and J. V. Sweedler, "Hybrid Three-Dimensional Nanofluidic/Microfluidic Devices Using Molecular Gates," Sensors and Actuators A , 102: 3 , 223-233, 2003 .

2002

•  Pahl, R. J. and M. A. Shannon, "Analysis of Monte Carlo Methods Applied to Blackbody and Lower Emissivity Cavities," Applied Optics , 41: 4 , 691-699, 2002.

2001

•  Raguin, G., M. Shannon, and J. G. Georgiadis, "Dispersion Radiale et Axiale Dans les Écoulements Hélicoïdaux de Taylor-Couette et Poiseuille (Radial and Axial Dispersion in Taylor-Couette and Poiseuille Spiral Flows)," International Journal of Heat and Mass Transfer , 44: 17 , 3295-3306, 2001.

•  Hrnjak, P. S., M. A. Shannon, T. M. Leicht, and N. R. Miller, "Detection of Liquid Mass Fraction at the Evaporator Exit of Refrigeration Systems," International Journal of Thermal Sciences - Revue Generale de Themique , 40: 8 , 773-786, 2001.

•  Selby, J. C., M. A. Shannon, K. Xu, and J. Economy, "Sub-Micrometer Solid-State Adhesive Bonding with Aromatic Thermosetting Copolyesters for the Assembly of Polyimide Membranes in Silicon-based Devices," Journal of Micromechanics and Microengineering , 11: 6 , 672-685, 2001.

•  Hammonds Jr., J. S., M. A. Shannon, and C. Li, "Spatial Output Field for Arbitrary Input Light Field in a Thermally Self-Induced Inhomogeneous Medium," Optics Communications , 194: 1-3 , 47-57, 2001.

•  Shannon, M. A., T. M. Leicht, P. S. Hrnjak, N. R. Miller, and F. A. Khan, "Thin-Film Resistance Sensor for Measuring Liquid Mass Fraction in Super-Heated Refrigerant," Sensors and Actuators A , 88, 164-177, 2001.

•  Chung, H. L., M. H. Jilavi, T. P. Duffey, M. A. Shannon, W. M. Kriven, and J. Mazumder, "NbAl 3 /Al Microlaminated Thin Films Deposited by UV Laser Ablation," Thin Solid Films , 388: 1-2 , 101-106, 2001.

•  Selby, J. C., M. L. Philpott, and M. A. Shannon, "Fabrication of Mesoscopic, Flexible, High Pressure, Microchannel Heat Exchangers (MHEx)," Transactions of NAMRI/SME , XXIX, 469-476, 2001.

2000

•  Moser, K. W., L. G. Raguin, A. Harris, H. D. Morris, J. Georgiadis, M. Shannon, and M. Philpott, "Visualization of Taylor-Couette and Spiral Poiseuille Flows Using a Snapshot FLASH Spatial Tagging Sequence," Magnetic Resonance Imaging , 18: 2 , 199-207, 2000.

•  Xu, K., J. Economy, and M. A. Shannon, "A General Purpose Adhesive for Microelectronic Devices," International Journal of Microcircuits and Electronic Packaging (IJMEP) , 23: 1 , 78-83, 2000.

1999

•  Li, C. and M. A. Shannon, "A Simplified Cavity Analysis for Estimating Energy Coupling During Laser Ablation and Drilling of Solids - Experiment," Applied Surface Science , 150, 211-226, 1999.

1998

•  Shannon, M. A., "A Simplified Cavity Analysis for Estimating Energy Coupling During Laser Ablation and Drilling of Solids - Theory," Applied Surface Science , 127-129, 218-225, 1998.

1997

•  Shannon, M. A., X. Mao, and R. E. Russo, "Monitoring Laser-Energy Coupling to Solid Materials: Plasma-Shielding and Phase Change," Materials Science and Engineering B 45, 172-179, 1997.

1996

•  Shannon, M. A. and R. E. Russo, "Monitoring Stress Power During High-Power Pulsed Laser-Material Interactions," Applied Surface Science , 96-98, 149-153, 1996.

•  Russo, R. E., X. L. Mao, M. Caetano, and M. A. Shannon, "Fundamental Characteristics of Laser-Material Interactions (Ablation) in Noble Gases at Atmospheric Pressure Using Inductively Coupled Plasma-Atomic Emission Spectroscopy," Applied Surface Science , 96-98, 144-148, 1996.

•  Mao, X. L., W.-T. Chan, M. Caetano, M. A. Shannon, and R. E. Russo, "Preferential Vaporization and Plasma Shielding During Nano-Second Laser Ablation," Applied Surface Science , 96-98, 126-130, 1996.

•  Shannon, M. A., B. Rubinsky, and R. E. Russo, "Mechanical Stress Power Measurements During High-Power Laser Ablation," Journal of Applied Physics , 80: 8 , 4665-4672, 1996.

1995

•  Fernandez, A. J., X. L. Mao, W. T. Chan, M. A. Shannon, and R. E. Russo, "Correlation of Spectral Emission Intensity in the Inductively Coupled Plasma and Laser-Induced Plasma During Laser Ablation of Solid Samples," Analytical Chemistry , 67: 14 , 2444-2450, 1995.

•  Shannon, M. A., X. L. Mao, A. Fernandez, W.-T. Chan, and R. E. Russo, "Laser Ablation Mass Removal Versus Incident Power Density During Solid Sampling for Inductively Coupled Plasma Atomic Emission Spectroscopy," Analytical Chemistry , 67: 24 , 4522-4529, 1995.

•  Shannon, M. A. and R. E. Russo, "Laser-Induced Stresses Versus Mechanical Stress Power Measurements During Laser Ablation of Solids," Applied Physics Letters , 67: 22 , 3227-3229, 1995.

•  Mao, X. L., M. A. Shannon, A. J. Fernandez, and R. E. Russo, "Temperature and Emission Spatial Profiles of Laser-Induced Plasmas During Ablation Using Time-Integrated Emission Spectroscopy," Journal of Applied Spectroscopy , 49: 7 , 1054-1062, 1995.

1994

•  Shannon, M. A., B. Rubinsky, and R. E. Russo, "Detecting Laser-Induced Phase Change at the Surface of Solids via Latent Heat of Melting with a Photothermal Deflection Technique," Journal of Applied Physics , 75: 3 , 1473-1485, 1994.

•  Qiu, T., C.-L Tien, M. A. Shannon, R. E. Russo, "Thermal and Mechanical Responses of Gold Films During Nanosecond Laser-Pulse Heating," Journal of Experimental Heat Transfer, 7: 3 , 175-188, 1994.

1993

•  Mao, X. L., W. T. Chan, M. A. Shannon, and R. E. Russo, "Plasma Shielding During Picosecond Laser Sampling of Solid Materials by Ablation in He versus Ar Atmosphere," Journal of Applied Physics , 74: 8 , 4915-4922, 1993.

•  Schurig, D. A., G. L. Klunder, M. A. Shannon, R. E. Russo, and R. J. Silva, "Signal Analysis of Transients in Pulsed Photoacoustic Spectroscopy," Review of Scientific Instruments , 64: 2 , 363-373, 1993.

1992

•  Shannon, M. A., A. A. Rostami, and R. E. Russo, "Photothermal Deflection Measurements for Monitoring Heat Transfer During Modulated Laser Heating of Solids," Journal of Applied Physics , 71: 1 , 53-63, 1992.

 

PROFESSIONAL ORGANIZATIONS

American Society of Mechanical Engineers (ASME)
American Physical Society (APS)
American Institute of Chemical Engineering (AIChE)
American Association for the Advancement of Science (AAAS)
Charter Member Instrumentation Systems and Devices Study Group (NIH)